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Multilayer Calculation on SR Signal during Growth of ZnO Nanorod

Authors
J. S. Byun윤재진Y. D. KimE. Ahn윤의준안성진이규철
Issue Date
2008
Publisher
한국물리학회
Keywords
Nanorod; Spectral reflectance; ZnO
Citation
Journal of the Korean Physical Society, v.53, no.1, pp.388 - 391
Journal Title
Journal of the Korean Physical Society
Volume
53
Number
1
Start Page
388
End Page
391
URI
https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/19247
ISSN
0374-4884
Abstract
The growth procedure of ZnO nanorods was monitored by in-situ spectral re ectance (SR) method. The ZnO nanorods were grown on both Si and sapphire substrates by using catalyst-free, low-pressure metalorganic chemical vapor deposition. We observed that the SR signals at all wavelengths changed by the same amount at the first stage of ZnO growth and then followed different trajectories for different wavelengths. Distortion of the SR oscillation was observed, which was interpreted to indicate the starting point of the growth of nanorods. To confirm the analysis, we compared the measured SR signal with the SR response calculated by using multilayer model.
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