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DC Magnetron Sputter 방식으로 증착한 비정질 탄소막의 내에칭 특성연구
- Authors
- 이소연
- Issue Date
- 27-Jan-2021
- Publisher
- 한국반도체산업협회
- Citation
- 제28회 한국반도체학술대회
- Conference Name
- 제28회 한국반도체학술대회
- Place
- KO
화상회의(Zoom)
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