Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic K-Ga2O3open access
- Authors
- Lim, Namsoo; Min, Jungwook; Min, Jung-Hong; Kang, Chun Hong; Li, Kuang-Hui; Park, Tae -Yong; Kim, Woochul; Davaasuren, Bambar; Ng, Tien Khee; Ooi, Boon S.; Ha Woo, Deok; Park, Ji-Hyeon; Pak, Yusin
- Issue Date
- Jan-2023
- Publisher
- ELSEVIER
- Citation
- APPLIED SURFACE SCIENCE, v.609
- Journal Title
- APPLIED SURFACE SCIENCE
- Volume
- 609
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/21528
- DOI
- 10.1016/j.apsusc.2022.155350
- ISSN
- 0169-4332
1873-5584
- Abstract
- Orthorhombic kappa-Ga2O3, as one of the Ga2O3 polymorphs, is considered a promising as ultrawide bandgap material for extreme environment devices. It is considered more superior than the conventional group III-V compound semiconductors and silicon carbides in extreme environments demanding material/device characteristics of high-voltage, high-temperature, high-pressure, high-impact, and high-radiation. In this study, we demonstrate ultrasensitive ultraviolet-C (UV-C) detection using Si-doped orthorhombic kappa-Ga2O3 photodetectors. A 150 nm thick kappa-Ga2O3 film was grown on a 2-inch diameter sapphire (a-Al2O3) wafer via metal organic chemical vapor deposition (MOCVD) method. The crystallinity of orthorhombic kappa-Ga2O3 film was investigated by X-ray diffraction (XRD) and transmission electron micro-scopy (TEM). The ultrawide bandgap of approximately 4.9 eV was confirmed by UV transmittance measurement. For UV-C detection analysis, a planar device with a channel length of 20 mu m was fabricated using Au/Ti metal contacts on the orthorhombic kappa-Ga2O3 film. The device doped under 15 sccm SiH4 flow rate showed ultrahigh photoresponse of similar to 72.1 A/W, I-on/I-off of-14, and decent rise ( similar to 0.35 s) and decay (similar to 1.79 s). Our results will contribute to the understanding on a new material phase of kappa-Ga2O3, as well as on developing optoelectronics devices with high radiation hardness suitable for operation in extreme environments.
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Collections - Department of Optical Engineering > 1. Journal Articles
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