산화물과 질산염으로 제조한 투명전극 타깃용 다성분계 IGZO 세라믹스Multicomponent IGZO Ceramics for Transparent Electrode Target Fabricated from Oxides and Nitrates
- Other Titles
- Multicomponent IGZO Ceramics for Transparent Electrode Target Fabricated from Oxides and Nitrates
- Authors
- 이현권; 윤지혜; 조경식
- Issue Date
- 2019
- Publisher
- 한국분말야금학회
- Keywords
- Sputtering target; Calcination; Transparent conducting electrodes; IGZO ceramics
- Citation
- 한국분말야금학회지, v.26, no.5, pp.375 - 382
- Journal Title
- 한국분말야금학회지
- Volume
- 26
- Number
- 5
- Start Page
- 375
- End Page
- 382
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/225
- DOI
- 10.4150/KPMI.2019.26.5.375
- ISSN
- 1225-7591
- Abstract
- Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent electrode targets are prepared from the oxides and nitrates as the source materials, and their properties are characterized. The selected compositions were In2O3:Ga2O3:ZnO = 1:1:2, 1:1:6, and 1:1:12 in mole ratio based on oxide. As revealed by X-ray diffraction analysis, calcination of the selected oxide or nitrides at 1200oC results in the formation of InGaZnO4, InGaZn3O6, and InGaZn5O8 phases. The 1:1:2, 1:1:6, and 1:1:12 oxide samples pressed in the form of discs exhibit relative densities of 96.9, 93.2, and 84.1%, respectively, after sintering at 1450oC for 12 h. The InGaZn3O6 ceramics prepared from the oxide or nitrate batches comprise large grains and exhibit homogeneous elemental distribution. Under optimized conditions, IGZO multicomponent ceramics with controlled phases, high densities, and homogeneous microstructures (grain and elemental distribution) are obtained.
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