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가공명미세결함의 나노 인프로세스 측정을 위한 AFM시스템의 개발Development of an AFM-Based System for Nano In-Process Measurement of Defects on Machined Surfaces
- Other Titles
- Development of an AFM-Based System for Nano In-Process Measurement of Defects on Machined Surfaces
- Issue Date
- 2002
- Publisher
- 대한기계학회
- Citation
- 대한기계학회논문집 A, v.26, no.3, pp 15 - 543
- Pages
- 529
- Journal Title
- 대한기계학회논문집 A
- Volume
- 26
- Number
- 3
- Start Page
- 15
- End Page
- 543
- ISSN
- 1226-4873
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- There are no files associated with this item.
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Collections - School of Mechanical System Engineering > 1. Journal Articles
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