비접촉 원자간력 현미경의 탐침 캔틸레버 진동 특성 및 측정 성능 평가Vibration Characteristics and Performance of Cantilever for Non-contact Atomic Force Microscopy
- Other Titles
- Vibration Characteristics and Performance of Cantilever for Non-contact Atomic Force Microscopy
- Authors
- 박준기; 권현규; 홍성욱
- Issue Date
- 2004
- Publisher
- 한국소음진동공학회
- Keywords
- Atomic Force Microscope(원자간력 현미경); Cantilever(캔틸레버; 외팔보); Non-contact Mode(비접촉 모드); Topography(형상); Finite Element Modeling(유한요소모델링); Natural Frequency(고유진동수)
- Citation
- 한국소음진동공학회논문집, v.14, no.6, pp 495 - 502
- Pages
- 8
- Journal Title
- 한국소음진동공학회논문집
- Volume
- 14
- Number
- 6
- Start Page
- 495
- End Page
- 502
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/22749
- ISSN
- 1598-2785
2287-5476
- Abstract
- This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.
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Collections - School of Mechanical System Engineering > 1. Journal Articles
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