원자간력 현미경을 이용한 초소형 마이크로 부품 표면 형상 측정 시스템 개발Development of a Measurement System for the Surface Shape of Micro-parts by Using Atomic Force Microscope
- Other Titles
- Development of a Measurement System for the Surface Shape of Micro-parts by Using Atomic Force Microscope
- Authors
- 홍성욱; 신영현; 이득우; 고명준
- Issue Date
- 2005
- Publisher
- 한국생산제조학회
- Keywords
- Atomic force microscope; Image matching; Correlation coefficient; Coordinate measuring machine; Contact/Noncontact measurement; Force gradient; Atomic force microscope; Image matching; Correlation coefficient; Coordinate measuring machine; Contact/Noncontact measurement; Force gradient; 원자간력 현미경; 영상정합; 상관계수; 3차원 측정기; 접촉/비접촉 측정; 힘구배
- Citation
- 한국생산제조학회지, v.14, no.6, pp 22 - 30
- Pages
- 9
- Journal Title
- 한국생산제조학회지
- Volume
- 14
- Number
- 6
- Start Page
- 22
- End Page
- 30
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/22802
- ISSN
- 2508-5093
2508-5107
- Abstract
- This paper proposes a measurement method for the surface shape of micro-parts by using an atomic force microscope(AFM). To this end, two techniques are presented: First, the measurement range is expanded by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is proposed that utilizes the inherent trigger mechanism due to the atomic force. The proposed methods are proved effective through a series of experiments.
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Collections - School of Mechanical System Engineering > 1. Journal Articles
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