바이몰프형 PZT를 이용한 소형만능재료시험기용정밀 구동 액추에이터의 개발Development of a New Precision Actuator by Bi-morph Type PZT to Realize Nano/Micro Mechanical Testing in MUTM
- Other Titles
- Development of a New Precision Actuator by Bi-morph Type PZT to Realize Nano/Micro Mechanical Testing in MUTM
- Authors
- 권현규; 최성대; 정선환
- Issue Date
- 2006
- Publisher
- 한국기계가공학회
- Keywords
- 바이몰프형 압전소자; 소형만능시험기; 인프로세스측정; 원자현미경; Bi-morph type PZT; MUTM; In-process Measurement; AFM
- Citation
- 한국기계가공학회지, v.5, no.1, pp 45 - 50
- Pages
- 6
- Journal Title
- 한국기계가공학회지
- Volume
- 5
- Number
- 1
- Start Page
- 45
- End Page
- 50
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/22812
- ISSN
- 1598-6721
2288-0771
- Abstract
- This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4㎜ respectively.
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Collections - School of Mechanical System Engineering > 1. Journal Articles
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