아르곤 가스만을 이용하여 PES 기판 상에 성장시킨 플렉시블 유기발광소자용 비정질 IZO 애노드 박막의 특성Characteristics of Amorphous IZO Anode Films Grown on Passivated PESSubstrates in Oxygen Free Ambient for Flexible OLEDs
- Other Titles
- Characteristics of Amorphous IZO Anode Films Grown on Passivated PESSubstrates in Oxygen Free Ambient for Flexible OLEDs
- Authors
- 배정혁; 정순욱; 김한기; 문종민; 강재욱
- Issue Date
- 2006
- Publisher
- 한국전기전자재료학회
- Keywords
- Indium zinc oxide (IZO); RF magnetron sputtering; Flexible substrate; Phosphorescent OLEDs; Indium zinc oxide (IZO); RF magnetron sputtering; Flexible substrate; Phosphorescent OLEDs
- Citation
- 전기전자재료학회논문지, v.19, no.12, pp 1134 - 1139
- Pages
- 6
- Journal Title
- 전기전자재료학회논문지
- Volume
- 19
- Number
- 12
- Start Page
- 1134
- End Page
- 1139
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/22850
- ISSN
- 1226-7945
- Abstract
- Electrical, optical, and structural properties of indium zinc oxide (IZO) anode films grown by a RF magnetron sputtering were investigated as functions of RF power and working pressure in pure Ar ambient. To investigate electrical, optical and structural properties of IZO anode films, 4-point probe and UV/VIS spectrometry, and X-ray diffraction (XRD) were performed, respectively. A sheet resistance of 15.2 Ω/, average transmittance above 80 % in visible range, expecially above 85 % in 550 nm, and root mean square roughness of 1.13 nm were obtained from optimized IZO anode films grown in oxygen free ambient. All samples show amorphous structure regardless of RF power and working pressure due to low substrate temperature. In addition, XPS depth profile obtained from IZO/PES exhibits that there is no obvious evidence of interfacial reaction between IZO and PES substrate. Furthermore, current-voltage-luminance of the flexible phosphorescent flexible OLEDs fabricated on IZO anode shows dependence on sheet resistance of the IZO anode. These results indicate that the IZO anode is a promising candidate to substitute conventional ITO anode for high-quality flexible displays.
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