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원통형 이종 접합 소재의 SiO2/Ag스퍼터 증착과 온도 변화에 따른 기계적 특성에 관한 연구The study on the Improvement of Mechanical performance due to change in Temperature and Sputtering by SiO2/Ag material of Bonded Dissimilar materials with Cylindrical shape

Other Titles
The study on the Improvement of Mechanical performance due to change in Temperature and Sputtering by SiO2/Ag material of Bonded Dissimilar materials with Cylindrical shape
Authors
이승현최성대이종형
Issue Date
2012
Publisher
한국기계가공학회
Keywords
Sputtering(진공증착); Vacuum Chamber(진공로); Dielectric(유전체); Ferrite(페라이트); Orbital/Rotation(공전; 자전); Target(SiO2/Ag); DCMagnetron Sputtering; RFMagnetron Sputtering sputtering deposition (Sputtering 증착); Magnetic Isotropic(자기 등방성); Magnetic Anisotropy(자기 이방성)
Citation
한국기계가공학회지, v.11, no.3, pp 138 - 145
Pages
8
Journal Title
한국기계가공학회지
Volume
11
Number
3
Start Page
138
End Page
145
URI
https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/23197
ISSN
1598-6721
2288-0771
Abstract
The material used in this study is dielectric and ferrite. Because of the unique characteristics of the material, it is easily exposed to external shocks and pressure, which cause damage to the product. However, after being processed under high-temperature environment repeatedly, the mechanical strength of the product is greatly increased due to the change of the electrical properties. In this paper, dielectric and bonded ferrite material was tested for the material properties. The equipment for this experiment was produced and tested to allow Cylindrical and Three-dimensional geometry of the product for the vacuum deposition. For Cylindrical shape of the product, in order to obtain the equivalent film thickness, the device is constructed in a vacuum chamber which gives arbitrary revolving and rotating capability. The electrical performance of the product is obtained through this process as well. However, as mentioned above, with repeating processes under high temperature and exposure to external environment, the product is easy to be broken. This experiment has enabled us to find out a stable condition to apply the communication of the RF high frequency to each of the core elements, such as Ferrite and Dielectric which is then used for the mechanical strength of the Raw material, hetero-junction material, Hetero-junction Ag Coating material and hetero-junction Ag Coating SiO2 Coating material respectively.
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