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나노 변위확대기구의 정밀위치결정기구에 관한 연구Development of the Precision Positioning Mechanism by Nano Displacement Magnification Device
- Other Titles
- Development of the Precision Positioning Mechanism by Nano Displacement Magnification Device
- Issue Date
- 2013
- Publisher
- 한국기계가공학회
- Keywords
- PZT actuator; Flexure hinge; Displacement magnification; Precision stage; 압전 구동기; 탄성 힌지; 변위 확대; 정밀스테이지
- Citation
- 한국기계가공학회지, v.12, no.1, pp 97 - 103
- Pages
- 7
- Journal Title
- 한국기계가공학회지
- Volume
- 12
- Number
- 1
- Start Page
- 97
- End Page
- 103
- ISSN
- 1598-6721
2288-0771
- Abstract
- A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about 100㎛ displacement to the 10V input voltage(1.5㎛). And the about 50nm of linearity error in the 30㎛ measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.
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