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나노인프로세스 형상계측 및 미세가공용 프로브의 개발Development of a New Probe to Realize Nano/Micro Mechanical Machining and In-Process Profile Measurement
- Other Titles
- Development of a New Probe to Realize Nano/Micro Mechanical Machining and In-Process Profile Measurement
- Authors
- Kweon, Hyun-Kyu; Choi, Seong Dae
- Issue Date
- Mar-2003
- Publisher
- 한국기계가공학회
- Citation
- 한국기계가공학회지, v.2, no.1, pp 75 - 84
- Pages
- 10
- Journal Title
- 한국기계가공학회지
- Volume
- 2
- Number
- 1
- Start Page
- 75
- End Page
- 84
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Collections - School of Mechanical System Engineering > 1. Journal Articles
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