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Effects of SiO2 addition on discharge characteristics of the MgO protective layer in plasma display panel

Authors
Lee, H. K.Kim, J. W.Park, S. J.Choi, S. Y.
Issue Date
23-Apr-2007
Publisher
ELSEVIER SCIENCE SA
Keywords
plasma display panel; MgO-SiO2; protective layer; crystallinity; surface roughness; discharge characteristics
Citation
THIN SOLID FILMS, v.515, no.12, pp 5113 - 5117
Pages
5
Journal Title
THIN SOLID FILMS
Volume
515
Number
12
Start Page
5113
End Page
5117
URI
https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/27215
DOI
10.1016/j.tsf.2006.10.022
ISSN
0040-6090
Abstract
In order to improve the discharge characteristics of MgO protective layer, SiO2 was added to MgO thin films. The MgO-SiO2 thin films were deposited by electron beam evaporation method. The crystallinity and surface roughness of thin films were determined by XRD and AFM. Discharge characteristics of MgO-SiO2 protective layers were observed by changes in discharging voltages and SEE and memory coefficients as a function of Si concentration in the protective layer. The discharge characteristics of MgO-SiO2 layer were mainly affected by changes in crystallinity and surface roughness of films with Si concentration in the range of present study. With addition of 12.5 Si at.% in MgO-SiO2 protective layer, the discharge voltages and memory and SEE coefficients were considerably improved in comparison to pure MgO protective layer. (c) 2006 Elsevier B.V. All rights reserved.
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