Effects of Contact Potential and Sidewall Surface Plane on the Performance of GaN Vertical Nanowire MOSFETs for Low-Voltage Operation
- Authors
- Son, Dong-Hyeok; Thingujam, Terirama; Kim, Jeong-Gil; Kim, Dae-Hyun; Kang, In Man; Im, Ki-Sik; Theodorou, Christoforos; Ghibaudo, Gerard; Cristoloveanu, Sorin; Lee, Jung-Hee
- Issue Date
- Apr-2020
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- Contact potential; GaN vertical nanowire MOSFET (VNW-MOSFET); low-voltage application; nanowire diameter; negative transconductance (NT)
- Citation
- IEEE TRANSACTIONS ON ELECTRON DEVICES, v.67, no.4, pp 1547 - 1552
- Pages
- 6
- Journal Title
- IEEE TRANSACTIONS ON ELECTRON DEVICES
- Volume
- 67
- Number
- 4
- Start Page
- 1547
- End Page
- 1552
- URI
- https://scholarworks.bwise.kr/kumoh/handle/2020.sw.kumoh/28348
- DOI
- 10.1109/TED.2020.2975599
- ISSN
- 0018-9383
1557-9646
- Abstract
- GaN-based materials are expected to show excellent immunity against short-channel effects because they have relatively lower permittivity and higher electron effective mass, compared to other materials such as Si, Ge, and In(Ga)As. To further reduce the short-channel effects, it is important to enhance the gate controllability of the device by utilizing a gate-all-around (GAA) structure. In this article, GaN vertical GAA nanowire MOSFETs with various diameters of 120, 75, and 45 nm have been fabricated. The device with a diameter of 120 nm shows a threshold voltage of 0.7 V, drain saturation voltage of 0.5 V, and subthreshold swing of 70 mV/decade, which would be suitable for low-voltage/power applications. However, the devices with smaller diameters of 75 and 45 nm show peculiar characteristics, such as a second rise of the drain current in output characteristics and a negative transconductance.
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