필터 프레싱으로 제조한 대형 알루미나 세라믹스 성형체 및 소결체의 특성

Abstract

The size of various alumina ceramics used in semiconductor and display industry is also required to increase with increase in wafer and panel size. In this research, large alumina ceramics was fabricated by filter pressing of alumina slurry using commercial powder and thereafter sintering at 1600℃ in gas furnace. The characteristics of large alumina ceramics thereby were compared to those of small alumina ceramics prepared by pressure forming such as uniaxial pressing and CIP. Careful control of properties of alumina slurry and filter pressing made the fabrication of large alumina ceramics possible, and its characteristics were equivalent to those of small alumina ceramics. The large alumina ceramics, prepared by sintering the green body of 63% relative density at 1600℃, exhibited both dense microstructure corresponding to 98.5% of relative density and 99.8% of high purity as in starting powder.