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Si-Wafer의 Wet Etching시 Etchant 조성 변화에 따른 물리적, 전기적 특성 변화
- Authors
- Roh, Jae Seung
- Issue Date
- 8-Nov-2013
- Publisher
- 한국재료학회
- Citation
- 2013년도 한국재료학회 추계학술발표대회 및 제 25회 신소재 심포지엄, v.2013, no.2, pp.176
- Conference Name
- 2013년도 한국재료학회 추계학술발표대회 및 제 25회 신소재 심포지엄
- Place
- KO
롯데호텔제주
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Collections - Department of Materials Science and Engineering > 2. Conference Papers
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Related Researcher
- Roh, Jae Seung
- College of Engineering (Department of Materials Science and Engineering)