직접 확산 방식을 이용한 반도체 장비 통신 프로토콜 구현The Implementation of Communication Protocol for Semiconductor Equipments using Directed Diffusion
- Other Titles
- The Implementation of Communication Protocol for Semiconductor Equipments using Directed Diffusion
- Authors
- 김두용; 조현찬
- Issue Date
- 2013
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Directed Diffusion; SECS; Semiconductor Equipment Communication Protocol; Directed Diffusion; SECS; Semiconductor Equipment Communication Protocol
- Citation
- 반도체디스플레이기술학회지, v.12, no.2, pp.39 - 43
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 12
- Number
- 2
- Start Page
- 39
- End Page
- 43
- URI
- https://scholarworks.bwise.kr/sch/handle/2021.sw.sch/14334
- ISSN
- 1738-2270
- Abstract
- The semiconductor equipments generate necessary data through communication networks for the effective manufacturing processes and automation of semiconductor equipments. For transferring data between semiconductor equipments and sending data to monitor equipments, several standards for communication protocols have been proposed. Communication networks in semiconductor manufacturing systems will transmit a lot of data traffic, which can be vulnerable in data delay and network failure. Therefore, it is required that data traffic need to be distributed. To accomplish this objective, we recommend the use of a redundant and valuable communication path which is constructed by a wireless sensor network. In this paper, the directed diffusion method for wireless sensor networking is suggested for networking semiconductor equipments. It is shown that how the directed diffusion is employed to connect semiconductor equipments. Also, we show how to implement the SECS of semiconductor equipments communication protocols based on the directed diffusion.
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Collections - College of Engineering > Department of Electronic Engineering > 1. Journal Articles
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