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Low-Temperature Fabrication and Characteristics of Lanthanum Indium Zinc Oxide Thin-Film Transistors

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dc.contributor.authorPark, Jae Chul-
dc.contributor.authorKim, Sang Wook-
dc.contributor.authorKim, Chang Jung-
dc.contributor.authorLee, Ho-Nyeon-
dc.date.accessioned2021-08-12T03:26:40Z-
dc.date.available2021-08-12T03:26:40Z-
dc.date.issued2012-05-
dc.identifier.issn0741-3106-
dc.identifier.issn1558-0563-
dc.identifier.urihttps://scholarworks.bwise.kr/sch/handle/2021.sw.sch/15230-
dc.description.abstractWe fabricated lanthanum indium zinc oxide (IZO) (La-IZO) thin-film transistors (TFTs) using radio frequency cosputtering of IZO and lanthanum. The field-effect mobility and switching ratio of the La-IZO TFTs were 4.2 cm(2) . V-1 . s(-1) and on the order of 10(8), respectively, before thermal annealing and 3.02 cm(2) . V-1 . s(-1) and on the order of 10(10), respectively, after thermal annealing at 150 degrees C in air. Our La-IZO TFTs had better thermal stability than pure-IZO TFTs due to the stable ionic bond between La and O.-
dc.format.extent3-
dc.language영어-
dc.language.isoENG-
dc.publisherInstitute of Electrical and Electronics Engineers-
dc.titleLow-Temperature Fabrication and Characteristics of Lanthanum Indium Zinc Oxide Thin-Film Transistors-
dc.typeArticle-
dc.publisher.location미국-
dc.identifier.doi10.1109/LED.2012.2188849-
dc.identifier.scopusid2-s2.0-84860360644-
dc.identifier.wosid000303322500019-
dc.identifier.bibliographicCitationIEEE Electron Device Letters, v.33, no.5, pp 685 - 687-
dc.citation.titleIEEE Electron Device Letters-
dc.citation.volume33-
dc.citation.number5-
dc.citation.startPage685-
dc.citation.endPage687-
dc.type.docTypeArticle-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasssci-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.subject.keywordPlusNITRIDE-
dc.subject.keywordAuthorIndium-
dc.subject.keywordAuthorlanthanum-
dc.subject.keywordAuthorthin-film transistors (TFTs)-
dc.subject.keywordAuthorzinc-
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