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Matlab을 이용한 증착기 챔버 내의 구리 입자 이동 모사
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 주영철 | - |
| dc.date.accessioned | 2021-08-11T11:23:52Z | - |
| dc.date.available | 2021-08-11T11:23:52Z | - |
| dc.date.created | 2021-06-17 | - |
| dc.date.issued | 2018-12 | - |
| dc.identifier.issn | 2586-7288 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/sch/handle/2021.sw.sch/5415 | - |
| dc.language | 한국어 | - |
| dc.language.iso | ko | - |
| dc.publisher | 순천향대학교 부설 산업기술연구소 | - |
| dc.title | Matlab을 이용한 증착기 챔버 내의 구리 입자 이동 모사 | - |
| dc.title.alternative | Simulation of copper particle movement in a depositionchamber using the Matlab | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 주영철 | - |
| dc.identifier.bibliographicCitation | 순천향산업기술연구소논문지, v.24, no.2, pp.171 - 174 | - |
| dc.relation.isPartOf | 순천향산업기술연구소논문지 | - |
| dc.citation.title | 순천향산업기술연구소논문지 | - |
| dc.citation.volume | 24 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 171 | - |
| dc.citation.endPage | 174 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 3 | - |
| dc.subject.keywordAuthor | 증착기 | - |
| dc.subject.keywordAuthor | 구리 | - |
| dc.subject.keywordAuthor | 입자 전산해석 | - |
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Related Researcher
- Joo, Young cheol
- College of Engineering (Department of Mechanical Engineering)