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Matlab을 이용한 증착기 챔버 내의 구리 입자 이동 모사Simulation of copper particle movement in a depositionchamber using the Matlab
- Other Titles
- Simulation of copper particle movement in a depositionchamber using the Matlab
- Authors
- 주영철
- Issue Date
- Dec-2018
- Publisher
- 순천향대학교 부설 산업기술연구소
- Keywords
- 증착기; 구리; 입자 전산해석
- Citation
- 순천향산업기술연구소논문지, v.24, no.2, pp.171 - 174
- Journal Title
- 순천향산업기술연구소논문지
- Volume
- 24
- Number
- 2
- Start Page
- 171
- End Page
- 174
- ISSN
- 2586-7288
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- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 1. Journal Articles
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Related Researcher
- Joo, Young cheol
- College of Engineering (Department of Mechanical Engineering)