Pham, DP[Duy Phong Pham]; Lee, S[Lee, Sunhwa]; Kim, S[Kim, Sehyeon]; Chowdhury, S[Chowdhury, Sanchari]; QUDDAMAH, K. M.[QUDDAMAH, KHOKHAR MUHAMMAD]; Le, AHT[Anh Huy Tuan Le]; Kim, Y[Kim, Youngkuk]; Park, J[Park, Jinjoo]; Yi, J[Yi, Junsin]
ArticleIssue Date2021CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.121PublisherELSEVIER SCI LTD