Ultra-thin stack of n-type hydrogenated microcrystalline silicon and silicon oxide front contact layer for rear-emitter silicon heterojunction solar cells
- Authors
- Pham, DP[Duy Phong Pham]; Kim, S[Kim, Sangho]; Kim, S[Kim, Sehyeon]; Lee, S[Lee, Sunhwa]; Le, AHT[Anh Huy Tuan Le]; Park, J[Park, Jinjoo]; Yi, J[Yi, Junsin]
- Issue Date
- 15-Jun-2019
- Publisher
- ELSEVIER SCI LTD
- Keywords
- Rear-emitter silicon heterojunction solar cells; Hydrogenated microcrystalline silicon oxide films; Front contact layers
- Citation
- MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.96, pp.1 - 7
- Indexed
- SCIE
SCOPUS
- Journal Title
- MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Volume
- 96
- Start Page
- 1
- End Page
- 7
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/9585
- DOI
- 10.1016/j.mssp.2019.02.017
- ISSN
- 1369-8001
- Abstract
- We demonstrate the clear advantage of a n-type hydrogenated microcrystalline silicon (n-mu c-Si:H) seed layer on the optoelectronic properties and crystallisation behaviour of n-type hydrogenated microcrystalline silicon oxide (n-mu c-SiOx:H) front contact layers. The presence of a non-oxidic n-mu c-Si:H seed layer can reduce the thickness and refractive index of the n-mu c-SiOx:H front layer significantly while maintaining a high degree of crystallisation and excellent conductivity. This leads to increase in short-circuit current density (J(sc)) by 2.64% and open-circuit voltage (V-oc) by 0.56% in comparison to that of a device without the seed layer. The enhancement in Jsc can be attributed to the reduction in parasitic absorption loss in the extremely thin front layer. In addition, the improvement in V-oc can result from enhanced surface passivation of the wafer due to seed layer growth in very high hydrogen plasma environment which can play a role as the hydrogen post-plasma treatment. The low thickness of the n-mu c-SiOx:H front layer yields lower internal recombination losses. In conjunction with an optimised n-mu c-Si:H seed layer and n-mu c-SiOx:H front layer, we obtained a high conversion efficiency value of 21.8% with V-oc of 727 mV, J(sc) of 39 mA/cm(2), and FF of 77% among the fabricated cells in laboratory.
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Collections - Graduate School > Energy Science > 1. Journal Articles
- Information and Communication Engineering > School of Electronic and Electrical Engineering > 1. Journal Articles
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