A stretchable nanoscale dielectric for large-area wearable electronics

Abstract

Conventional dielectric layers used in stretchable electronics are solution-processed, thick and have poor electrical performance compared with rigid, inorganic dielectrics. A stretchable nanometre-thick gate dielectric layer has been produced using large-area vacuum deposition. This material has excellent electrical, mechanical and chemical properties and could facilitate the development of high-performance wearable devices.