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Reduction of Threshold Voltage Hysteresis of MoS2 Transistors with 3-Aminopropyltriethoxysilane Passivation and Its Application for Improved Synaptic Behavior

Authors
Han, K.H.[Han, K.H.]Kim, G.-S.[Kim, G.-S.]Park, J.[Park, J.]Kim, S.-G.[Kim, S.-G.]Park, J.[Park, J.]Yu, H.-Y.[Yu, H.-Y.]
Issue Date
12-Jun-2019
Publisher
American Chemical Society
Keywords
3-aminopropyltriethoxysilane; molybdenum disulfide; surface passivation; synapse applications; threshold voltage hysteresis
Citation
ACS Applied Materials and Interfaces, v.11, no.23, pp.20949 - 20955
Indexed
SCIE
SCOPUS
Journal Title
ACS Applied Materials and Interfaces
Volume
11
Number
23
Start Page
20949
End Page
20955
URI
https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/15060
DOI
10.1021/acsami.9b01391
ISSN
1944-8244
Abstract
Although molybdenum disulfide (MoS2) is highlighted as a promising channel material, MoS2-based field-effect transistors (FETs) have a large threshold voltage hysteresis (ΔVTH) from interface traps at their gate interfaces. In this work, the ΔVTH of MoS2 FETs is significantly reduced by inserting a 3-aminopropyltriethoxysilane (APTES) passivation layer at the MoS2/SiO2 gate interface owing to passivation of the interface traps. The ΔVTH is reduced from 23 to 10.8 V by inserting the 1%-APTES passivation layers because APTES passivation prevents trapping and detrapping of electrons, which are the major source of the ΔVTH. The reduction in the density of interface traps (Dit) is confirmed by the improvement of the subthreshold swing (SS) after inserting the APTES layer. Furthermore, the improvement in the synaptic characteristics of the MoS2 FET through the APTES passivation is investigated. Both inhibitory and excitatory postsynaptic currents (PSC) are increased by 33% owing to the reduction in the ΔVTH and the n-type doping effect of the APTES layer; moreover, the linearity of PSC characteristics is significantly improved because the reduction in ΔVTH enables the synaptic operation to be over the threshold region, which is linear. The application of the APTES gate passivation technique to MoS2 FETs is promising for reliable and accurate synaptic applications in neuromorphic computing technology as well as for the next-generation complementary logic applications. © 2019 American Chemical Society.
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