Quality improvement of fast-synthesized graphene films by rapid thermal chemical vapor deposition for mass production
- Authors
- Lee, S.[Lee, S.]; Park, W.K.[Park, W.K.]; Yoon, Y.[Yoon, Y.]; Baek, B.[Baek, B.]; Yoo, J.S.[Yoo, J.S.]; Kwon, S.B.[Kwon, S.B.]; Kim, D.H.[Kim, D.H.]; Hong, Y.J.[Hong, Y.J.]; Kang, B.K.[Kang, B.K.]; Yoon, D.H.[Yoon, D.H.]; Yang, W.S.[Yang, W.S.]
- Issue Date
- Mar-2019
- Publisher
- Elsevier Ltd
- Keywords
- Fast-synthesis; Graphene; Quality improvement; Rapid thermal chemical vapor deposition
- Citation
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology, v.242, pp.63 - 68
- Indexed
- SCIE
SCOPUS
- Journal Title
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology
- Volume
- 242
- Start Page
- 63
- End Page
- 68
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/15679
- DOI
- 10.1016/j.mseb.2019.03.004
- ISSN
- 0921-5107
- Abstract
- The conventional thermal chemical vapor deposition (T-CVD) equipment takes a long time to synthesize a thin film, which is the stumbling block in the commercialization of monolayer graphene. Rapid thermal chemical vapor deposition (RT-CVD) equipment is suitable for rapid graphene synthesis on most surfaces of large area transition metals. The initial graphene domains synthesized by RT-CVD were visualized and compared with graphene synthesized by T-CVD. The number of graphene domains grown by RT-CVD was approximately 12.31% larger than those synthesized by T-CVD. The surface of the thermally treated metal substrate determines the density and shape of the graphene domains due to the reduced surface irregularities and hence flattens. As a result of the thermal treatment of the copper foil, the I D /I G value of RT-CVD graphene decreased by 12.5%. Thus, it was confirmed that the electrical characteristics were improved as the average value of the sheet resistance reduced by 15.8%. © 2019 Elsevier B.V.
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Collections - Engineering > School of Advanced Materials Science and Engineering > 1. Journal Articles
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