Plasmonic Nanopore with Nanopattern and Nanoparticles for Single Molecule Analysis

Abstract

In this report, the nano-hole on the electron beam induced membrane surrounded by periodic groove patterns are fabricated by focused ion beam technique (FIB), field emission scanning electron microscopy (FESEM), and transmission electron microscopy (TEM). Initially, a approximate to 200nm thick Au films was deposited on the microfabricated pyramid, or on the flat plate by using a sputter-deposition technique. Nano-pore formation inside the FIB drilled Au aperture was controlled down to a few nanometer by using electron beam irradiations. Periodic patterns would enhance the optical intensity through the nano-aperture. Au particles were formed on the membrane several months after electron beam irradiations. In addition, surface plasmon-enhanced Raman spectroscopy measurements were performed and the greatest optical intensity from on the pyramidal aperture surrounded with the nanopattern was measured. Fabricated plasmonic pore-device can be utilized as a next generation optical sensor for single molecule analysis. TEM images of the fabricated nanopore surrounded by periodic patterns on the plate are presented with electron beam profile on the detector.