Boron-doped hydrogenated mixed-phase silicon as thermo-sensing films for infrared detectors
- Authors
- Pham, DP[Duy Phong Pham]; Park, J[Park, Jinjoo]; Shin, C[Shin, Chonghoon]; Kim, S[Kim, Sangho]; Nam, Y[Nam, Yonghyun]; Kim, G[Kim, Geunho]; Kim, M[Kim, Minsik]; Yi, J[Yi, Junsin]
- Issue Date
- Feb-2018
- Publisher
- ELSEVIER SCI LTD
- Keywords
- Micro-bolometers; Infrared detectors; Boron-doped; Hydrogenated silicon films
- Citation
- MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.74, pp.165 - 169
- Indexed
- SCIE
SCOPUS
- Journal Title
- MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Volume
- 74
- Start Page
- 165
- End Page
- 169
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/21228
- DOI
- 10.1016/j.mssp.2017.10.034
- ISSN
- 1369-8001
- Abstract
- Silicon materials have been widely used as thermo-sensing layers in infrared detectors or uncooled micro-bolometers. Parameters such as a large thermal coefficient of resistance (TCR), low sheet resistance (R-s), and low 1/ f noise are important for high performance of these devices. However, there is always a trade-off between these parameters. For example, the crystalline silicon materials typically exhibit low R-s and 1/f noise, and significantly low TCR, while the amorphous silicon materials generally have large TCR, and considerably high Rs and 1/ f noise. Consequently, the best trade-off can be achieved by using a mixed-phase structure of silicon materials, i. e. an intermediate form between the crystalline and amorphous structures. Herein we report the important characteristics of hydrogenated mixed-phase silicon films, deposited by the plasma-enhanced chemical vapour deposition process, for infrared detectors. The films in the mixed-phase structure showed high TCR values in the range of 2-3% K-1 and moderate sheet resistances in range of 10-40 M Omega sq(-)1. These results indicate that the mixed-phase silicon films are potential alternatives to conventional boron doped hydrogenated amorphous and microcrystalline silicon films for use as thermo-sensing layers in infrared detectors.
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- Appears in
Collections - Information and Communication Engineering > School of Electronic and Electrical Engineering > 1. Journal Articles
- Graduate School > Energy Science > 1. Journal Articles
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