Analysis and Design of Resonant Inverter for Reactive Gas Generator Considering Characteristics of Plasma Load
- Authors
- Ahn, H.M.[Ahn, H.M.]; Sung, W.-Y.[Sung, W.-Y.]; Lee, B.K.[Lee, B.K.]
- Issue Date
- Jan-2018
- Publisher
- SPRINGER SINGAPORE PTE LTD
- Keywords
- High frequency DC-AC inverter; Phase shift full bridge converter; Reactive gas generator
- Citation
- JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY, v.13, no.1, pp.345 - 351
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY
- Volume
- 13
- Number
- 1
- Start Page
- 345
- End Page
- 351
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/21463
- DOI
- 10.5370/JEET.2018.13.1.345
- ISSN
- 1975-0102
- Abstract
- This paper analyzes a resonant inverter to generate plasma. The resonant inverter consists of a full bridge converter, resonant network and reactor to generate a magnetic field for plasma generation. A plasma load has very distinct characteristics compared to conventional loads. The characteristics of plasma load are analyzed through experimental results. This paper presents the study on the resonant network, which was performed in order to determine how to achieve a constant current gain. Another important contribution of this study is the analysis of drop-out phenomenon observed in plasma loads which is responsible for unpredictable shutdown of the plasma generator that requires stable operation. In addition, the design process for the resonant network of a plasma generator is proposed. The validity of this study is verified through simulations and experimental results.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - Information and Communication Engineering > School of Electronic and Electrical Engineering > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/21463)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.