Kim, S.[Kim, S.]; Jeong, S.[Jeong, S.]; Kim, H.[Kim, H.]; Khokhar, M.Q.[Khokhar, M.Q.]; Dhungel, S.K.[Dhungel, S.K.]; Dao, V.-A.[Dao, V.-A.]; Pham, D.P.[Pham, D.P.]; Kim, Y.[Kim, Y.]; Yi, J.[Yi, J.]
ArticleIssue Date2023CitationMaterials Science in Semiconductor Processing, v.160PublisherElsevier Ltd