Hussain, SQ[Hussain, Shahzada Qamar]; Oh, WK[Oh, Woong-Kyo]; Ahn, S[Ahn, Shihyun]; Le, AHT[Anh Huy Tuan Le]; Kim, S[Kim, Sunbo]; Iftiquar, SM[Iftiquar, S. M.]; Velumani, S[Velumani, Subramaniam]; Lee, Y[Lee, Youngseok]; Yi, J[Yi, Junsin]
ArticleIssue Date2014CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.24, pp.225 - 230PublisherELSEVIER SCI LTD