Pham, DP[Duy Phong Pham]; Kim, S[Kim, Sangho]; Kim, S[Kim, Sehyeon]; Lee, S[Lee, Sunhwa]; Le, AHT[Anh Huy Tuan Le]; Park, J[Park, Jinjoo]; Yi, J[Yi, Junsin]
ArticleIssue Date2019CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.96, pp.1 - 7PublisherELSEVIER SCI LTD