Kim, HT[Kim, H. T.]; Kwon, BS[Kwon, B. S.]; Lee, NE[Lee, N. -E.]; Park, YS[Park, Y. S.]; Cho, HJ[Cho, H. J.]; Hong, B[Hong, B.]
ArticleIssue Date2008CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.26, no.4, pp.861 - 864PublisherA V S AMER INST PHYSICS