Venkatesan, A[Venkatesan, A.]; Rathi, S[Rathi, Servin]; Kim, Y[Kim, Yunseob]; Kim, H[Kim, Hanul]; Whang, D[Whang, Dongmok]; Yun, SJ[Yun, Sun Jin]; Kim, GH[Kim, Gil-Ho]
ArticleIssue Date2020CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.115PublisherELSEVIER SCI LTD