Shin, C[Shin, Chonghoon]; Iftiquar, SM[Iftiquar, S. M.]; Park, J[Park, Jinjoo]; Kim, Y[Kim, Youngkuk]; Kim, S[Kim, Sangho]; Jung, J[Jung, Junhee]; Yi, J[Yi, Junsin]
ArticleIssue Date2017CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.66, pp.223 - 231PublisherELSEVIER SCI LTD