Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Effect of Hydrogen Gas Ratio on the Characteristics of Pulsed DC-Magnetron Sputtered ITO Films in Amorphous/Crystalline Silicon Heterojunction Solar Cells
- Authors
- Kim, S.[Kim, S.]; Jung, J.[ Jung, J.]; Kim, Y.[Kim, Y.]; Le, A.H.T.[ Le, A.H.T.]; Ahn, S.[ Ahn, S.]; Park, J.[ Park, J.]; Kim, Y.[ Kim, Y.]; Ai Dao, V.[ Ai Dao, V.]; Lee, J.[Lee, J.]; Lee, Y.-J.[ Lee, Y.-J.]; Yi, J.[Yi, J.]
- Issue Date
- May-2017
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- Anti-Reflection Layer; Binding Energy; HIT Solar Cell; Hydrogen Flow Ratio; Pulsed DC Magnetron Sputtering
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.5, pp.3229 - 3232
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Volume
- 17
- Number
- 5
- Start Page
- 3229
- End Page
- 3232
- ISSN
- 1533-4880
- Abstract
- This study investigates the effect of hydrogen gas ratio [H-2/H-2+Ar] had on the structural, optical and electrical properties of ITO films for use in amorphous/crystalline silicon hetero-junction solar cells. The pulsed DC magnetron sputtered ITO films showed a higher optical transmittance for a hydrogen gas ratio of 3.2%. The lowest sheet resistance (43.12 Omega/square) and resistivity (3.25x10(-4) Omega.cm) were observed for ITO films where the hydrogen gas ratio was in the range from 1.31 to 3.22%. The Hall mobility of the ITO films decreased from 55.3 to 42.5 cm(2)/V.s with an increase in the hydrogen gas ratio from 1.31 to 3.2%. The surface morphology and crystallinity of films improved for the low hydrogen gas ratio while the characteristics of the ITO films deteriorated when the hydrogen ratio was higher than 3.2%. Then, we fabricated amorphous/crystalline silicon hetero-junction solar cells using ITO films for the front anti-reflection layer, and a hydrogen gas ratio of 3.22% resulted in a short circuit current density (J(sc)) of 38.17 mA/cm(2) and an efficiency of 19.02%.
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- YI, JUN SIN
- Information and Communication Engineering (Electronic and Electrical Engineering)