Effect of gas condition on graphene synthesized by rapid thermal chemical vapor deposition
- Authors
- Lee, YS[Lee, Yang Soo]; Jeong, DI[Jeong, Dong In]; Yoon, Y[Yoon, Yeojoon]; Baek, B[Baek, Byeongmin]; Choi, HW[Choi, Hyung Wook]; Bin Kwon, S[Bin Kwon, Seok]; Kim, D[Kim, Do Hun]; Hong, YJ[Hong, Young Joon]; Park, WK[Park, Won Kyu]; Song, YH[Song, Young Hyun]; Kang, BK[Kang, Bong Kyun]; Yoon, DH[Yoon, Dae Ho]; Yang, WS[Yang, Woo Seok]
- Issue Date
- May-2020
- Publisher
- KOREAN ASSOC CRYSTAL GROWTH, INC
- Keywords
- Graphene; Rapid thermal chemical vapor deposition; Gas condition
- Citation
- JOURNAL OF CERAMIC PROCESSING RESEARCH, v.21, no.S1, pp.S47 - S52
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF CERAMIC PROCESSING RESEARCH
- Volume
- 21
- Number
- S1
- Start Page
- S47
- End Page
- S52
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/4658
- DOI
- 10.36410/jcpr.2020.21.S1.s47
- ISSN
- 1229-9162
- Abstract
- Graphene was synthesized using rapid thermal chemical vapor deposition (RT-CVD) equipment designed to produce large-area graphene at high speed. The effects of methane (CH4), argon (Ar), and hydrogen (H-2) gases were investigated between 800 degrees C and 1,000 degrees C during heating and cooling in the graphene synthesis process. The findings reveal that multilayer domains increased due to hydrogen pretreatment with increase in temperature. Furthermore, when pretreated with the same gas, it was confirmed that the post-argon-treated sample cooled from 1,000 degrees C to 800 degrees C had a higher ID/IG value than that of the other samples. This result was consistent with the sheet resistance properties of graphene. The sample prepared in methane atmosphere maintained during both the pre-treatment and post-treatment demonstrated the lowest sheet resistance of 787.49 Omega/sq. Maintaining the methane gas atmosphere in the high-temperature region during graphene synthesis by RT-CVD reduced the defects and improved the electrical property.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - Engineering > School of Advanced Materials Science and Engineering > 1. Journal Articles
- Graduate School > Advanced Materials Science and Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.