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Fabrication of nano scale electrode for sensor using nanoimprint lithography
- Authors
- Choi N.-J.[Choi N.-J.]; Lee J.[Lee J.]; Bang G.S.[Bang G.S.]; Lee H.-K.[Lee H.-K.]; Moon S.E.[Moon S.E.]; Yang W.S.[Yang W.S.]; Lee H.[Lee H.]
- Issue Date
- 2015
- Keywords
- UV Nanoimprint; Nano-Scaled Electrode; Sensor
- Citation
- Journal of Nanoelectronics and Optoelectronics, v.10, no.4, pp.480 - 484
- Journal Title
- Journal of Nanoelectronics and Optoelectronics
- Volume
- 10
- Number
- 4
- Start Page
- 480
- End Page
- 484
- Abstract
- We have developed a single-layer UV-nanoimprint process, which was utilized to fabricate 9 by 9 crossbar circuits with various nano-scaled electrodes. Fabricated nano-sized electrode using mold has sub 100 nm width and sub 1 nm average roughness. Their surface morphology was observed by using atomic force microscopy (AFM) and scanning electron microscopy (SEM). And we have proved that the double layer electrodes can be fabricated by layer by layer fabrication method of nanoimprint technique. Copyright © 2015 American Scientific Publishers. All rights reserved.
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Collections - Science > Department of Chemistry > 1. Journal Articles
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