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Fine luminescent patterning on ZnO nanowires and films using focused electron-beam irradiation

Authors
Il Kim, D[Il Kim, Dong]Hong, YK[Hong, Young Ki]Lee, SH[Lee, Suk Ho]Kim, J[Kim, Jeongyong]Joo, J[Joo, Jinsoo]
Issue Date
Sep-2014
Publisher
ELSEVIER SCIENCE BV
Keywords
ZnO; Nanowire; Focused electron beam; Electron irradiation; Photoluminescence
Citation
CURRENT APPLIED PHYSICS, v.14, no.9, pp.1228 - 1233
Indexed
SCIE
SCOPUS
KCI
Journal Title
CURRENT APPLIED PHYSICS
Volume
14
Number
9
Start Page
1228
End Page
1233
URI
https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/51893
DOI
10.1016/j.cap.2014.06.025
ISSN
1567-1739
Abstract
ZnO thin films and nanowires (NWs) were precisely treated by focused electron-beam (E-beam) irradiation with a line width between 200 nm and 3 mu m. For both ZnO films and NWs, an increased green emission was clearly observed for the E-beam-treated parts. Using a high-resolution laser confocal microscope, the photoluminescence intensities for E-beam-treated ZnO structures increased with increasing dose 1.0 x 10(17)-1.0 x 10(18) electrons/cm(2). The resistivity of a single ZnO NW increased from 56 to 1800 Omega cm after the E-beam treatment. From the results for the annealed ZnO thin films, we analyzed that the variations in PL and resistivity were due to the formation of vacancies upon focused E-beam irradiation. (C) 2014 Elsevier B.V. All rights reserved.
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