Solution processed SiNxCyOz thin films thermally transformed from silicon oxide/melamine hybrid system
- Authors
- Jeong, J[Jeong, Jaehun]; Fujihara, K[Fujihara, Kan]; Pu, L[Pu, Lyongsun]; Yoo, JB[Yoo, Ji-Beom]; Lee, JY[Lee, Jun Young]; Cho, SM[Cho, Sung M.]; Lee, Y[Lee, Youngkwan]; Kim, SW[Kim, Seong Woo]; Hwang, T[Hwang, Taeseon]; Nam, JD[Nam, Jae-Do]
- Issue Date
- 31-Jul-2013
- Publisher
- ELSEVIER SCIENCE SA
- Citation
- THIN SOLID FILMS, v.539, pp.294 - 302
- Indexed
- SCIE
SCOPUS
- Journal Title
- THIN SOLID FILMS
- Volume
- 539
- Start Page
- 294
- End Page
- 302
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/59899
- DOI
- 10.1016/j.tsf.2013.05.079
- ISSN
- 0040-6090
- Abstract
- In this study, a solution-processable precursor of melamine and silicon oxide, was prepared and thermally converted into inorganic thin films of SiNxCyOz. Using tetra-ethoxysilane and hydroxyl-methyl-melamine, a transparent coating with a high loading content of silica of up to 50% was achieved through the hydrolysis/condensation reactions, which provided a transmittance of 85.1% (thickness of 1.5 +/- 0.2 mu m) and hard coating grade of 4H pencil test. When the silica/melamine coating was further heat-treated up to 900 degrees C in an inert environment, the organic melamine was converted into an inorganic compound composed of Si, N, C, and O atoms in the form of SiNxCyOz. The relative compositions of films varied with the heat-treatment temperature, e.g., providing SiN0.03C0.59O1.87 for the thin film heat-treated at 700 degrees C. The resulting inorganic thin films were mechanically strong and optically shiny with a low root mean square of roughness (<1.0 nm) giving dielectric constants varying from 2.75 to 1.82 with heat treatment temperature that could be used as low-k materials in commercialized optoelectronic devices. (C) 2013 Elsevier B.V. All rights reserved.
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- Appears in
Collections - Engineering > Chemical Engineering > 1. Journal Articles
- Engineering > School of Chemical Engineering > 1. Journal Articles
- Engineering > School of Advanced Materials Science and Engineering > 1. Journal Articles
- Engineering > Polymer Science and Engineering > 1. Journal Articles
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