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A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer
- Authors
- Kim P.[Kim P.]; An J.[An J.]; You K.[You K.]
- Issue Date
- 2012
- Citation
- Communications in Computer and Information Science, v.339 CCIS, pp.245 - 253
- Indexed
- SCOPUS
- Journal Title
- Communications in Computer and Information Science
- Volume
- 339 CCIS
- Start Page
- 245
- End Page
- 253
- ISSN
- 1865-0929
- Abstract
- The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability. © 2012 Springer-Verlag.
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Related Researcher
- YOU, KWAN HO
- Information and Communication Engineering (Electronic and Electrical Engineering)