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Preparation and characterization of Nb2O5-Al2O3 composite oxide formed by cathodic electroplating and anodizing
- Authors
- Jang, JH[Jang, Joo-Hee]; Kim, TY[Kim, Tae-Yoo]; Kim, NJ[Kim, Nam-Jeong]; Lee, CH[Lee, Chang-Hyoung]; Park, EM[Park, Eun-Mi]; Park, C[Park, Chan]; Suh, SJ[Suh, Su-Jeong]
- Issue Date
- 15-Nov-2011
- Keywords
- Anodizing; Cathodic electroplating; Nb2O 5-Al2O3 composite oxide; Thin film capacitor
- Citation
- MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, v.176, no.18, pp.1505 - 1508
- Indexed
- SCIE
SCOPUS
- Volume
- 176
- Number
- 18
- Start Page
- 1505
- End Page
- 1508
- ISSN
- 0921-5107
- Abstract
- Al foil was coated with niobium oxide by cathodic electroplating and anodized in a neutral boric acid solution to achieve high capacitance in a thin film capacitor. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) revealed the niobium oxide layer on Al to be a hydroxide-rich amorphous phase. The film was crystalline and had stoichiometric stability after annealing at temperatures up to 600 degrees C followed by anodizing at 500V, and the specific capacitance of the Nb2O5-Al2O3 composite oxide was approximately 27% higher than that of Al2O3 without a Nb2O5 layer. The capacitance was quite stable to the resonance frequency. Overall, the Nb2O5-Al2O3 composite oxide film is a suitable material for thin film capacitors. (C) 2011 Elsevier B.V. All rights reserved.
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