Adhesion Enhancement of Electroless-Deposited Cu on Flexible Polyimide Substrate Treated by O-2 and N-2/H-2 Inductively Coupled Plasmas
- Authors
- Kim, HW[Kim, H. W.]; Kim, JH[Kim, J. H.]; Kim, DJ[Kim, D. J.]; Lee, NE[Lee, N. -E.]
- Issue Date
- 2009
- Publisher
- ELECTROCHEMICAL SOC INC
- Citation
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.156, no.12, pp.D525 - D530
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Volume
- 156
- Number
- 12
- Start Page
- D525
- End Page
- D530
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/79881
- DOI
- 10.1149/1.3231849
- ISSN
- 0013-4651
- Abstract
- The detailed characterization of polyimide (PI) surfaces modified by sequential O-2 and N-2/H-2 inductively coupled plasma (ICP) treatments was performed, and the effects of the surface morphological roughening and chemical modification of the PI surface on the adhesion properties of electroless-plated Cu on the PI systems were investigated. The increase in the surface morphological roughness induced by increasing the substrate bias power in the O-2 ICPs was primarily responsible for the enhancement of the adhesion strength of the electroless-plated Cu on PI. The amine (-NH2) or amide (-NH) functional groups generated on the PI surface, due to the opening of the cyclized imide ring by the subsequent N-2/H-2 plasma treatment, also enhanced the adhesion of the electroless Cu/PI interface. The peel tests confirmed the improvement of the adhesion strength, with the best peel strengths of congruent to 96 gf/mm being obtained for the sample subjected to the combined treatment of the sequential O-2 and N-2/H-2 ICPs. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3231849] All rights reserved.
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Collections - Engineering > School of Advanced Materials Science and Engineering > 1. Journal Articles
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