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Growth of Metal-Free Carbon Nanotubes with an Amorphous Carbon Catalyst Layer
- Authors
- Song, W[Song, Woochang]; Lim, DG[Lim, Dong-Gun]; Kim, HD[Kim, Hee Dong]; Lee, JH[Lee, Jae-Hyeoung]; Cha, J[Cha, Jaesang]; Park, G[Park, Gooman]; Choi, EC[Choi, Eun Chang]; Hwang, HS[Hwang, Hyun Suk]; Cho, HJ[Cho, Hyung Jun]; Hong, B[Hong, Byungyou]; Choi, WS[Choi, Won Seok]
- Issue Date
- Oct-2008
- Publisher
- KOREAN PHYSICAL SOC
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.53, no.4, pp.2142 - 2146
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 53
- Number
- 4
- Start Page
- 2142
- End Page
- 2146
- ISSN
- 0374-4884
- Abstract
- An amorphous carbon (a-C) thin film was used as a catalyst, layer to grow metal-free carbon nanotubes (CNTs). The a-C films were deposited with a closed-field unbalanced magnetron (CFUBM) sputtering method on Si substrates. The CNTs were prepared using a microwave plasma-enhanced chemical-vapor deposition (MPECVD) method with an a-C catalyst film coated onto a silicon substrate by using methane (CH4) and hydrogen (H-2) gas. The CNTs were grown at different temperatures (550 degrees C, 650 degrees C and 750 degrees C) with other conditions being held constant. Field emission scanning electron microscopy (FE-SEM) images showed growth trend of the CNTs against temperature. High-resolution transmission electron microscopy (HR-TEM) images showed the CNTs to be multi-walled. Energy dispersive spectroscopy (EDS) measurements confirmed that the CNTs consisted solely of carbon.
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Related Researcher
- HONG, BYUNG YOU
- Information and Communication Engineering (Electronic and Electrical Engineering)