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Diamond-like carbon protective anti-reflection coating for Si solar cell
- Issue Date
- 29-Feb-2008
- Publisher
- ELSEVIER SCIENCE BV
- Citation
- MATERIALS LETTERS, v.62, no.4-5, pp.577 - 580
- Indexed
- SCIE
SCOPUS
- Journal Title
- MATERIALS LETTERS
- Volume
- 62
- Number
- 4-5
- Start Page
- 577
- End Page
- 580
- ISSN
- 0167-577X
- Abstract
- Diamond-like carbon (DLC) films were deposited on coming glass and silicon substrates by the RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method using methane (CH4) and hydrogen (H-2) gases. We examined the effects of the CH4 to H-2 ratio on the tribological and optical properties of the DLC films. The hardness of the DLC films was measured with a nano-indenter. The optical properties of the DLC thin film were investigated by UV/VIS spectrometry and ellipsometry. From these measurements, we obtained optimum anti-reflection coating at a methane flow rate of 20 sccm. Also, solar cells were fabricated on a silicon substrate using the optimized DLC films as an anti-reflection coating and we obtained an increase of solar cell efficiency of about 20%. (c) 2007 Elsevier B.V. All rights reserved.
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Related Researcher
- HONG, BYUNG YOU
- Information and Communication Engineering (Electronic and Electrical Engineering)