Characteristics of inductive coupled plasma with internal linear antenna using multi-polar magnetic field for FPD processing

Lim, J.H.[Lim, J.H.]; Kim, K.N.[Kim, K.N.]; Yeom, G.Y.[Yeom, G.Y.]

Detailed Information

Cited 0 time in webofscience

Cited 0 time in scopus

Metadata Downloads

Characteristics of inductive coupled plasma with internal linear antenna using multi-polar magnetic field for FPD processing

Authors: Lim, J.H.[Lim, J.H.]; Kim, K.N.[Kim, K.N.]; Yeom, G.Y.[Yeom, G.Y.]

Issue Date: 2007

Citation: Solid State Phenomena, v.124-126, no.PART 1, pp.271 - 274

Journal Title: Solid State Phenomena

Volume: 124-126

Number: PART 1

Start Page: 271

End Page: 274

URI: https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/85231

Files in This Item: There are no files associated with this item.

Appears in Collections: Engineering > School of Advanced Materials Science and Engineering > 1. Journal Articles

Show full item record

qrcode

Altmetrics

Total Views & Downloads

STATISTICS: Total View :5,671,781; Today View :1,240

RSS_1.0 RSS_2.0 ATOM_1.0

(03063) 25-2, SUNGKYUNKWAN-RO, JONGNO-GU, SEOUL, KOREAsamsunglib@skku.edu

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Detailed Information

Altmetrics

Total Views & Downloads

BROWSE