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Photon-stimulated H desorption from several H/Si(001) surfaces for resistless lithography
- Authors
- Jeon, C.[Jeon, C.]; Park, C.-Y.[Park, C.-Y.]; Hwang, C.-C.[Hwang, C.-C.]; Hwang, H.-N.[Hwang, H.-N.]; Song, H.[Song, H.]; Shin, H.-J.[Shin, H.-J.]; Moon, S.[Moon, S.]; Chung, S.[Chung, S.]
- Issue Date
- 2007
- Citation
- Journal of the Korean Physical Society, v.50, no.6, pp.1745 - 1749
- Journal Title
- Journal of the Korean Physical Society
- Volume
- 50
- Number
- 6
- Start Page
- 1745
- End Page
- 1749
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Collections - Science > Department of Physics > 1. Journal Articles
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