Plasma and electrical characteristics of a novel internal linear inductively coupled plasma source for flat panel display applications

Abstract

In this study, using two different linear internal-type inductively coupled plasma, sources with a serpentine-type antenna, and a novel double-comb-type antenna having the size of 1,020 mm x 830 mm, are compared the characteristics of plasmas for the application to the flat panel display manufacturing. The use of the double-comb-type antenna instead of the serpentine-type antenna showed a higher plasma density, a higher radical density, and more plasma stability when an inductive power higher than 2000 W was applied to the source. By the application of a 5000 W inductive power with 15 mTorr Ar, a, high plasma density of 2.2 x 10(11)/cm(3) with a plasma uniformity of 8 % could be obtained for the double-comb-type antenna. The increases in the plasma density, the radical density, and the plasma stability for the double comb-type antenna compared to the serpentine-type antenna are due to its higher inductive coupling and lower standing wave effect.