Optimization of a simulation for 300mm FAB semiconductor manufacturing

Abstract

Many processes are composed of Bays with equipments. Most 300 mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300 mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line.