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A correction of geometric error of nano-indenter using atomic force microscope and finite element method

Authors
Baek, S[Baek, Seung]Cho, SK[Cho, Sung-Kuen]Seok, CS[Seok, Chang-Sung]
Issue Date
2006
Publisher
TRANS TECH PUBLICATIONS LTD
Keywords
tip blunting; indenter; tip radius; nano-indentation; geometric error
Citation
ADVANCED NONDESTRUCTUVE EVALUATION I, PTS 1 AND 2, PROCEEDINGS, v.321-323, pp.129 - 131
Indexed
SCIE
SCOPUS
Journal Title
ADVANCED NONDESTRUCTUVE EVALUATION I, PTS 1 AND 2, PROCEEDINGS
Volume
321-323
Start Page
129
End Page
131
URI
https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/89129
ISSN
1013-9826
Abstract
In this study, we investigated indentation behavior by varying the tip radius in a finite element model. We measured the tip radius and shape of the nano-indenter by SPM (scanning probe microscope) and compared them with the simulation results. The tip radius of cube corner indenter was measured to be 39nm, in agreement with the common tip radius of such indenters, which range from 20 similar to 50nm.
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