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A correction of geometric error of nano-indenter using atomic force microscope and finite element method
- Issue Date
- 2006
- Publisher
- TRANS TECH PUBLICATIONS LTD
- Keywords
- tip blunting; indenter; tip radius; nano-indentation; geometric error
- Citation
- ADVANCED NONDESTRUCTUVE EVALUATION I, PTS 1 AND 2, PROCEEDINGS, v.321-323, pp.129 - 131
- Indexed
- SCIE
SCOPUS
- Volume
- 321-323
- Start Page
- 129
- End Page
- 131
- ISSN
- 1013-9826
- Abstract
- In this study, we investigated indentation behavior by varying the tip radius in a finite element model. We measured the tip radius and shape of the nano-indenter by SPM (scanning probe microscope) and compared them with the simulation results. The tip radius of cube corner indenter was measured to be 39nm, in agreement with the common tip radius of such indenters, which range from 20 similar to 50nm.
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Collections - Engineering > School of Mechanical Engineering > 1. Journal Articles
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