Threshold voltage instability and polyimide charging effects of LTPS TFTs for flexible displaysopen access
- Authors
- Kim, H.[Kim, H.]; Park, J.[Park, J.]; Khim, T.[Khim, T.]; Bak, S.[Bak, S.]; Song, J.[Song, J.]; Choi, B.[Choi, B.]
- Issue Date
- Apr-2021
- Publisher
- Nature Research
- Citation
- Scientific Reports, v.11, no.1
- Indexed
- SCIE
SCOPUS
- Journal Title
- Scientific Reports
- Volume
- 11
- Number
- 1
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/89830
- DOI
- 10.1038/s41598-021-87950-0
- ISSN
- 2045-2322
- Abstract
- In this paper, we investigate the Vth shift of p-type LTPS TFTs fabricated on a polyimide (PI) and glass substrate considering charging phenomena. The Vth of the LTPS TFTs with a PI substrate positively shift after a bias temperature stress test. However, the Vth with a glass substrate rarely changed even with increasing stress. Such a positive Vth shift results from the negative charging of fluorine stemmed from the PI under the gate bias. In fact, the C–V characterization on the metal–insulator-metal capacitor reveals that charging at the SiO2/PI interface depends on the applied gate bias and the PI material, which agrees well with the TCAD simulation and SIMS analyses. As a result, the charging at the SiO2/PI interface contributes to the Vth shift of the LTPS TFTs leading to image sticking. © 2021, The Author(s).
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Collections - Information and Communication Engineering > School of Electronic and Electrical Engineering > 1. Journal Articles
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